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KMID : 0385520060190050400
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Analytical Science & Technology
2006 Volume.19 No. 5 p.400 ~ p.406
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Quantitative analysis of hydrogen in thin film by scattering-recoil co-measurement technique
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이화련/Lee HR
음철헌/최한우/김준곤/Eum CH/Choi HW/Kim JK
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Abstract
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KEYWORD
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Hydrogen analysis, ERD, Thin film
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